SELF-CHARGED THIN FILM-TYPE POWER SUPPLY DEVICE USING VIBRATION AND MICRODEVICE CONTAINING THE DEVICE

摘要

PURPOSE: A self-charged thin film-type power supply device and a microdevice containing the device are provided, to employ a micro generator generating the electricity by using vibration and to store the electric energy into a thin film secondary battery, thereby allowing the battery to be self-charged without the connection with an external wire. CONSTITUTION: The thin film-type power supply device(200) comprises a substrate(10); an anode charge current collector(31) and a cathode charge current collector(32) which are formed on the substrate; an anode thin film(33) which is formed on the anode charge current collector; an electrolyte thin film(34) which covers the upper surface and side of the anode thin film; a cathode(35) which is formed on the electrolyte and is connected with the cathode charge current collector; an insulating layer(36) which covers the total structure containing the cathode, and exposes some part of the anode charge current collector and the cathode charge current collector; wiring(60) which is connected with the anode charge current collector and the cathode charge current collector; and a generation unit of electricity(20) which is provided with a conversion unit to convert the vibration energy into the electric energy, is formed on the insulating layer, and supplies the electric energy to the anode charge current collector and the cathode charge current collector through the wiring(60).