| 摘要 |
PROBLEM TO BE SOLVED: To reduce the measurement error even in a case of the variation of a measured matter and a probe during the measurement and in a case of long measuring time, and to reduce the failure in measurement to improve the measuring efficiency. SOLUTION: This measuring method has a first scanning pattern and a second scanning pattern, having a common measuring position to each other, and comprises a first measuring stage (step S102a) measuring the measured matter with the first scanning pattern, a second measuring stage (step S102b) measuring the measured matter with the second scanning pattern, and a calculating stage (step S105) for allowing a result of the second measurement in the second measuring stage to follow a result of the first measurement in the first measuring stage.
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