发明名称 |
METHOD FOR PRODUCING 2-ALKYL-2-ADAMANTYL ESTER |
摘要 |
PROBLEM TO BE SOLVED: To provide a method for producing a 2-alkyl-2-adamantyl ester useful as a resist material for semiconductor in high efficiency and purity. SOLUTION: The objective ester can be produced by mixing and reacting a 2-alkyl-2-adamantanol metal or magnesium halide salt of general formula (1) (R1 is a 1-6C alkyl; and X is a halogen atom) such as 2-methyl-2-adamantanol magnesium bromide salt with a carboxylic acid halide compound such as methacryloyl chloride in the presence of a t-amine compound such as triethylamine.
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申请公布号 |
JP2002053522(A) |
申请公布日期 |
2002.02.19 |
申请号 |
JP20000242158 |
申请日期 |
2000.08.10 |
申请人 |
TOKUYAMA CORP |
发明人 |
HIROTA YOSHIHIRO;YAMAGUCHI MASAO;YAMAMOTO HIROMASA |
分类号 |
C07C67/14;C07C69/013;C07C69/54;(IPC1-7):C07C67/14 |
主分类号 |
C07C67/14 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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