发明名称 METHOD FOR PRODUCING 2-ALKYL-2-ADAMANTYL ESTER
摘要 PROBLEM TO BE SOLVED: To provide a method for producing a 2-alkyl-2-adamantyl ester useful as a resist material for semiconductor in high efficiency and purity. SOLUTION: The objective ester can be produced by mixing and reacting a 2-alkyl-2-adamantanol metal or magnesium halide salt of general formula (1) (R1 is a 1-6C alkyl; and X is a halogen atom) such as 2-methyl-2-adamantanol magnesium bromide salt with a carboxylic acid halide compound such as methacryloyl chloride in the presence of a t-amine compound such as triethylamine.
申请公布号 JP2002053522(A) 申请公布日期 2002.02.19
申请号 JP20000242158 申请日期 2000.08.10
申请人 TOKUYAMA CORP 发明人 HIROTA YOSHIHIRO;YAMAGUCHI MASAO;YAMAMOTO HIROMASA
分类号 C07C67/14;C07C69/013;C07C69/54;(IPC1-7):C07C67/14 主分类号 C07C67/14
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