发明名称 DEVICE FOR TAKING OUT SINGLE CRYSTAL
摘要 PROBLEM TO BE SOLVED: To simplify the structure of a device for taking a single crystal out of a single crystal growing chamber and to reduce the possibility of falling of the single crystal. SOLUTION: A motor 12 is attached so that a rotary shaft 12a is arranged in the horizontal direction and intersects perpendicularly with a horizontal supporting beam 3, and the rotary shaft 12a is connected to a connecting part 14. It is possible to control the connecting position, in the vertical direction, of a single crystal taking-out device 4 with the connecting part 14 so that the center of the rotation coincides with the center of the crystal 10 in the longitudinal direction. In the single crystal taking-out device 4, plural couples of holding arms 5, each having a tip end capable of being opened and closed for holding a lower cone part or a body part of the single crystal, are provided. The single crystal taking-out device 4 is connected to the rotary shaft of the motor through the connecting part 14 so that the rotation direction of the single crystal becomes vertical direction parallel to the horizontal supporting beam 3.
申请公布号 JP2002053400(A) 申请公布日期 2002.02.19
申请号 JP20000240333 申请日期 2000.08.08
申请人 SUPER SILICON KENKYUSHO:KK 发明人 MACHIDA TSUNEHISA
分类号 C30B35/00;C30B11/00;C30B15/30;H01L21/208;(IPC1-7):C30B35/00 主分类号 C30B35/00
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