发明名称 |
Jet plasma process for deposition of coatings |
摘要 |
The present invention provides a method for the formation of an organic coating on a substrate. The method includes: providing a substrate in a vacuum; providing at least one vaporized organic material comprising at least one component from at least one source, wherein the vaporized organic material is capable of condensing in a vacuum of less than about 130 Pa; providing a plasma from at least one source other than the source of the vaporized organic material; directing the vaporized organic material and the plasma toward the substrate; and causing the vaporized organic material to condense and polymerize on the substrate in the presence of the plasma to form an organic coating.
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申请公布号 |
US6348237(B2) |
申请公布日期 |
2002.02.19 |
申请号 |
US20010759803 |
申请日期 |
2001.01.12 |
申请人 |
3M INNOVATIVE PROPERTIES COMPANY |
发明人 |
KOHLER GUNTER A.;ESSWEIN WILLIAM H.;KIRK SETH M.;GATES BRIAN J. |
分类号 |
C23C16/50;B05D7/24;C23C16/448;C23C16/513;H01J37/32;(IPC1-7):C08J7/18 |
主分类号 |
C23C16/50 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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