| 摘要 |
PURPOSE: A method for correcting an error of a scaler according to a variation of temperature in a linear motor is provided to process accurately a target by producing adaptationally an error of a linear scaler according to the variation of temperature. CONSTITUTION: The first and the second heads(24a,24b) are moved as much as desired distance(x) to scan a main linear scaler(28a) and an auxiliary linear scaler(28b). The relative distances(A,B) of the main linear scaler(28a) and the auxiliary linear scaler(28b) are measured and stored in a control portion. An error of the main linear scaler(28a) can be corrected by using an absolute distance and the relative distance of the main linear scaler(28a). A worker can correct a local error of the main linear scaler(28a) by controlling arbitrarily scanning positions of the main linear scaler(28a) and the auxiliary linear scaler(28b).
|
