发明名称 WORK ROTATING APPARATUS
摘要 PROBLEM TO BE SOLVED: To provide a work rotating apparatus having a compound structure of a bearing mechanism and a vacuum chuck and simple in constitution. SOLUTION: In this work rotating apparatus, the vacuum chuck for sucking and holding a work is provided at one end part of a rotating shaft rotatably supported through the gas bearing mechanism. In the apparatus, an exhaust passage for discharging compressed air supplied to the gas bearing and an air sucking passage of the vacuum chuck are one and the same.
申请公布号 JP2002052429(A) 申请公布日期 2002.02.19
申请号 JP20000240571 申请日期 2000.08.09
申请人 ASAHI OPTICAL CO LTD 发明人 SAKAI YUJI
分类号 B23Q3/08;F16C32/06;(IPC1-7):B23Q3/08 主分类号 B23Q3/08
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