发明名称 Flip chip assembly
摘要 A method for forming a flip-chip-on-board assembly. An integrated circuit (IC) chip having a polyimide passivation layer is joined to a chip carrier via a plurality of solder bumps which electrically connect a plurality of contact pads on the IC chip to corresponding contacts on the chip carrier. A space is formed between a surface of the passivation layer and a surface of the chip carrier. A plasma is applied, to chemically modify the surface of the chip carrier and the passivation layer of the IC chip substantially without roughening the surface of the passivation layer. The plasma is either an O2 plasma or a microwave-generated Ar and N2O plasma. An underfill encapsulant material is applied to fill the space. The plasma treatment may be performed after the step of joining. Then, the chip and chip carrier are treated with the plasma simultaneously. Alternatively, the IC chip and chip carrier may be treated with the plasma before they are joined to one another. The plasma treatment improves adhesion between the encapsulant and the IC chip, and between the encapsulant and the chip carrier.
申请公布号 US6348738(B1) 申请公布日期 2002.02.19
申请号 US19990371975 申请日期 1999.08.11
申请人 INTERNATIONAL BUSINESS MACHINES CORPORATION 发明人 DERY JEAN;EGITTO FRANK D.;MATIENZO LUIS J.;OUELLET CHARLES;OUELLET LUC;QUESTAD DAVID L.;RUDIK WILLIAM J.;TRAN SON K.
分类号 H01L21/56;(IPC1-7):H01L23/48;H01L29/40;H01K3/34;H01K3/10 主分类号 H01L21/56
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