| 摘要 |
PROBLEM TO BE SOLVED: To provide a method for manufacturing a fluorinated glass product by which fluorine can be efficiently added. SOLUTION: In the method for manufacturing a fluorinated glass product by dehydrating and fluorinating a deposited body of glass fine particles formed by an OVD method, VAD method, or the like, the dehydration process is carried out in an atmosphere containing 0.01 to 0.4 mol% Cl and the fluorination process is carried out in an atmosphere containing >=1 mol% of F. By this method, Si-Cl coupling can be efficiently replaced by SiF coupling. Further, a fluorinated glass product improved in the transmittance characteristics in the UV region and vacuum UV region can be obtained. |
