发明名称 Methods for treating objects
摘要 An object is treated by contacting it with an organic solvent and then removing the organic solvent by directly displacing it with a fluid comprising a drying vapor (e.g., isopropyl alcohol or IPA vapor) such that substantially no liquid droplets of organic solvent are left on the surfaces of the object to evaporate after the direct displacement of the organic solvent with the fluid.
申请公布号 US6348101(B1) 申请公布日期 2002.02.19
申请号 US20000669789 申请日期 2000.09.26
申请人 CFMT, INC. 发明人 WALTER ALAN E.
分类号 B08B3/08;B08B3/12;(IPC1-7):B08B3/12;B08B5/00 主分类号 B08B3/08
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