发明名称 CORROSION-RESISTANT MEMBER
摘要 PROBLEM TO BE SOLVED: To provide a corrosion-resistant member facilitating the peeling of the corrosion-resistant material bonded to the surface of a ceramic base material and low in corrosion resistance. SOLUTION: The corrosion-resistant member 1 is constituted by bonding the corrosion-resistant material 3, which comprises a sintered body based on at least one kind of an element belonging to the group IIa or IIIa, to the surface of the ceramic base material 2 and a plurality of intermediate layers 4a, 4b and 4c, which comprise a sintered body containing the ceramic base material component and the corrosion-resistant material component, are arranged between the ceramic base material 2 and the corrosion-resistant material 3, and the differences of the coefficient of thermal expansion between the ceramic base material 2 and the intermediate layer 4a being in contact therewith, between the corrosion-resistant material 3 and the intermediate layer 4c being in contact therewith and between the intermediate layers 4a, 4b and 4c are set to 0.9 ppm/ deg.C or less.
申请公布号 JP2002052651(A) 申请公布日期 2002.02.19
申请号 JP20000244674 申请日期 2000.08.11
申请人 KYOCERA CORP 发明人 HAMADA TOSHIYUKI;NAKAHARA MASAHIRO
分类号 H05H1/46;B28B3/02;B32B18/00;H01L21/302;H01L21/3065 主分类号 H05H1/46
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