发明名称 |
POLISHED OBJECT HOLDING MEMBER |
摘要 |
PROBLEM TO BE SOLVED: To provide a polished object holding member for suppressing the scratching of a polished object. SOLUTION: The polished object holding member is formed by heating pressure molding of the layer of a para-aramide fiber substrate impregnated with a thermosetting resin. As the para-aramide fiber substrate, the member adopts a nonwoven cloth with para-aramide fiber chops and para-aramide fiber pulps mixedly made. A nonwoven cloth of the para-aramide fiber pulps also can be adopted. |
申请公布号 |
JP2002052461(A) |
申请公布日期 |
2002.02.19 |
申请号 |
JP20000244489 |
申请日期 |
2000.08.11 |
申请人 |
SHIN KOBE ELECTRIC MACH CO LTD |
发明人 |
TAKAHASHI KATSUHARU;HIRAOKA KOICHI |
分类号 |
B24B37/27;B24B37/28;B24B37/30;H01L21/304;(IPC1-7):B24B37/04 |
主分类号 |
B24B37/27 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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