发明名称 POLISHED OBJECT HOLDING MEMBER
摘要 PROBLEM TO BE SOLVED: To provide a polished object holding member for suppressing the scratching of a polished object. SOLUTION: The polished object holding member is formed by heating pressure molding of the layer of a para-aramide fiber substrate impregnated with a thermosetting resin. As the para-aramide fiber substrate, the member adopts a nonwoven cloth with para-aramide fiber chops and para-aramide fiber pulps mixedly made. A nonwoven cloth of the para-aramide fiber pulps also can be adopted.
申请公布号 JP2002052461(A) 申请公布日期 2002.02.19
申请号 JP20000244489 申请日期 2000.08.11
申请人 SHIN KOBE ELECTRIC MACH CO LTD 发明人 TAKAHASHI KATSUHARU;HIRAOKA KOICHI
分类号 B24B37/27;B24B37/28;B24B37/30;H01L21/304;(IPC1-7):B24B37/04 主分类号 B24B37/27
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