| 摘要 |
PROBLEM TO BE SOLVED: To provide a photoresist releasing liquid which is excellent in release properties and corrosion resistance, and can easily be handled from the viewpoint of safety. SOLUTION: The photoresist releasing liquid comprises (a) 45-85 wt.% of a specific alkylhydroxylamine, (b) 3-40 wt.% of a water-soluble organic solvent, preferably a specific alkanolamine, (c) 3-20 wt.% of an aromatic hydroxy compound, and (d) the rest of water.
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