发明名称 Methods for manufacturing electronic and electromechanical elements and devices by thin-film deposition and imaging
摘要 Electrically (and, possibly, mechanically) active patterns are applied using a colloidal suspension of nanoparticles that exhibit a desired electrical characteristic. The nanoparticles are surrounded by an insulative shells that may be removed by therefrom by application of energy (e.g., in the form of electromagnetic radiation or heat). The nanoparticle suspension is applied to a surface, forming a layer that is substantially insulative owing to the nanoparticle shells. The applied suspension is exposed to energy to remove the capping groups and fuse the particles into cohesion. If the nanoparticle suspension was deposited as a uniform film, the energy is applied in a desired pattern so that unexposed areas remain insulative while exposed areas exhibit the electrical behavior associated with the nanoparticles. If the nanoparticle suspension was deposited in a desired pattern, it may be uniformly exposed to energy. Additional layers may be applied in the same manner, one over the other, to form a multilayer device.
申请公布号 US6348295(B1) 申请公布日期 2002.02.19
申请号 US20000519722 申请日期 2000.03.03
申请人 MASSACHUSETTS INSTITUTE OF TECHNOLOGY 发明人 GRIFFITH SAUL;JACOBSON JOSEPH M.;MANALIS SCOTT
分类号 B81C1/00;G03F7/00;G03F7/004;H01L21/288;H01L51/40;H05K3/10;(IPC1-7):G03F7/00 主分类号 B81C1/00
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