发明名称 RF/microwave energized plasma light source
摘要 Apparatus for radiating energy at one or more predetermined wavelength comprising: a housing (4), a source of microwave energy coupled to and located outside the housing and a window forming part of the wall of the housing, the window being formed from a material which is substantially transparent to radiation at the or each predetermined wavelength and at the wavelength of the microwave source, the window including gas of a predetermined composition at a predetermined pressure contained in a gas-tight enclosure (2) defined by the window material, the gas composition being chosen to emit energy at the or each predetermined wavelength in response to microwave energy from the housing (4) impinging generally on an inner surface of the window, the window being arranged substantially to be opaque at the wavelength of the microwave energy and being arranged to provide an unobstructed radiating path from its outer surface for the energy of the or each predetermined wavelength.
申请公布号 US6348669(B1) 申请公布日期 2002.02.19
申请号 US20000673047 申请日期 2000.11.30
申请人 JENACT LIMITED 发明人 RUDD LITTLE RICHARD ANTHONY;BRIGGS DAVID
分类号 H01J65/04;(IPC1-7):B23K10/00 主分类号 H01J65/04
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