发明名称 Fabrication of micromachined sensors with insulating protection of the electrical connections for use in severe environments
摘要 Production of a sensor of physical quantity consists of preparing an active sensor part (10, 12) and a base (30). The active part incorporates at least one plate (22) provided with conductor connection contacts on one face and the base is provided with conducting pins (32). The contacts and pins are connected electrically by conductor elements (40). The plate and the ends of the pins are plunged into an electrolytic bath to effect an electrolytic deposit of at least one metal conductor (42) on the ends of the pins, contacts and the conductor elements. An oxidation or nitriding operation is effected to make up an insulating coating (44) on the ends of the pins, the contacts and the conductor elements. An Independent claim is included for the sensor of physical quantity produced by this process.
申请公布号 FR2812968(A1) 申请公布日期 2002.02.15
申请号 FR20000010581 申请日期 2000.08.11
申请人 THOMSON CSF 发明人 LEVERRIER BERTRAND;BRUNI MARCHIONNI MARIE DOMINIQUE
分类号 H01L21/60;H01L23/49 主分类号 H01L21/60
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