SCANNING TYPE SHAPE ANALYZER FOR ANALYZING SPACE OF WIDE INSPECTION FACE

摘要

PROBLEM TO BE SOLVED: To remarkably shorten a measuring time. SOLUTION: This scanning type shape analyzer calculates the next obtaining position P' using a face shape calculated based on a measured image data obtained n the present obtaining position P and the present obtaining attitude, controls to move to the next obtaining position where an intersection position Ro of an optical axis Oa of a beam and a reference face 1e in a measuring head 1 is calculated, and calculates the next obtaining attitude in the next obtaining position P' using the face shape obtained in the present obtaining position P and the present obtaining attitude to conduct controlling to make a reference axis Ra in the measuring head 1 consistent with the calculated obtaining attitude.