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发明名称
STEUERBARE MIKROSPALTZEILE
摘要
申请公布号
AT212125(T)
申请公布日期
2002.02.15
申请号
AT19990919188T
申请日期
1999.03.26
申请人
INSTITUT FUER PHYSIKALISCHE HOCHTECHNOLOGIE E.V.;PIEZOSYSTEM JENA PRAEZISIONSJUSTIERELEMENTE GMBH
发明人
GOETZ, BERNT;MARTIN, THOMAS;RIESENBERG, RAINER;SEIFERT, THOMAS
分类号
G01J3/04;G01J3/28;(IPC1-7):G01J3/04
主分类号
G01J3/04
代理机构
代理人
主权项
地址
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