| 摘要 |
PROBLEM TO BE SOLVED: To provide an electronic component measuring apparatus which realizes a high speed measurement and reduction of the load on electronic components and has a little influence of the characteristics difference in measuring systems on measured values. SOLUTION: The apparatus is a multiple type calibration measuring instrument comprising a plurality of measuring terminals 2a...2n to be contacted at once to a plurality of electronic components 4a...4n, switch 5 having a plurality of channels connected to the measuring terminals, measuring unit 6 connected to the switch 5 for detecting electronic signals flowing in the electronic components 4a...4n through the switch 5 and the measuring terminals 2a...2n to measure electric characteristics of the electronic components, means 9 for storing a plurality of collection values, based on characteristics values of measuring systems of the channels from the measuring unit 6 to the measuring terminals 2a...2n via the switch 5, and arithmetic control means 8 for switching and controlling the channels of the switch 5, reading corresponding collection values to the measuring systems of the switching channels of the switch 5 from the storing means 9 and collecting the values measured by the measuring unit 6 to calculate true measured values.
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