COLLOID-LIKE SILICA SLURRY

摘要

PROBLEM TO BE SOLVED: To provide a colloid-like silica slurry which will not adversely influence, such as corrosion to a silicon wafer and a wiring material on the silicon wafer, suppresses the occurrence of microbes, whose preservation stability is high, since the particle size stability of colloid particles is superior and which can be used continuously. SOLUTION: Colloid-like silica slurry which includes colloid-like silica prepared from low metal silica sol and antibacterial/biocide and whose pH is 6.0-8.0 is supplied.