发明名称 APPEARANCE INSPECTION JIG FOR SMALL COMPONENT, AND INSPECTION METHOD USING THE JIG
摘要 PROBLEM TO BE SOLVED: To provide a jig unnecessary for an inspector to pass a head assembly from one hand to the other hand many times when executing an appearance inspection from many directions. SOLUTION: This jig is provided with a base part 11 having an upper plane 11u to be a placing table of an optical microscope 100 in inspecting the appearance of a small component 30 using the optical microscope 100, and provided with a moving means 11b for moving the upper plane 11u almost parallel with the optical axis direction of at least an objective lens 103 of the optical microscope 100 in order to focus an inspected part of the small component 30 placed on the upper place 11u, on the focus of the optical microscope 100, an inspection object support part 20 provided with a support means 21 capable of supporting the small component 30 in a specified position on the base part 11, and reflecting mirror means 22 to 24 having mirror surfaces at the rising angle of about 45 deg. from the upper plane 11u of the base part 11.
申请公布号 JP2002048716(A) 申请公布日期 2002.02.15
申请号 JP20000200861 申请日期 2000.07.03
申请人 INTERNATL BUSINESS MACH CORP <IBM> 发明人 TSUCHIYA TATSUMI;YOSHIDA TATSUSHI;ITO KENJI;KOIKE TORU;MATSUMOTO YUSUKE;FUJIMORI MASASHI;NAKAGAWA SEIJI
分类号 G01N21/84;G01N21/88;G02B21/00;G11B5/48;(IPC1-7):G01N21/84 主分类号 G01N21/84
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