发明名称 SOLID-STATE IMAGE PICKUP ELEMENT, PRODUCTION METHOD THEREFOR AND DEVICE THEREOF
摘要 PROBLEM TO BE SOLVED: To provide a solid-state image pickup element, using an MOS-type image sensor capable of further miniaturization on microscopic scale by suppressing a fixed pattern noise, based on electric charges discharged from defects on the interface or the like of an element isolation insulating film and a semiconductor layer. SOLUTION: A gate electrode 19 is formed on a gate insulating film 18 by patterning a conductive film; an element isolation electrode 19a is formed on an insulating film 18a in an element isolation region 113; and an opposite conductive impurity is led in, while using the gate electrode 19 and the element separating electrode 19a as a mask. Then, source regions 16a and 16b, drain regions 17a and 17b and an impurity region 17 are formed, and elements are isolated.
申请公布号 JP2002050753(A) 申请公布日期 2002.02.15
申请号 JP20000237513 申请日期 2000.08.04
申请人 INNOTECH CORP 发明人 MITSUIDA TAKASHI
分类号 H01L27/146;H01L21/76;H01L31/10;H04N5/335;H04N5/365;H04N5/369;H04N5/374;(IPC1-7):H01L27/146 主分类号 H01L27/146
代理机构 代理人
主权项
地址