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发明名称
VERFAHREN UND EINRICHTUNG ZUR HERSTELLUNG EINER BESCHICHTUNG AUF EINEM SUBSTRAT
摘要
申请公布号
AT213281(T)
申请公布日期
2002.02.15
申请号
AT19970947127T
申请日期
1997.11.24
申请人
INSTITUT POLYTECHNIQUE DE SEVENANS
发明人
CODDET, CHRISTIAN;LIAO, HAN, LIN;HANSZ, BERNARD
分类号
C23C4/12;(IPC1-7):C23C4/12
主分类号
C23C4/12
代理机构
代理人
主权项
地址
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