METHOD AND DEVICE FOR INSPECTING FLAW IN THE VICINITY OF EDGE

摘要

PROBLEM TO BE SOLVED: To provide an inspection method and its device for surely detecting a flaw in the vicinity of an edge without misdetection of a flaw which does not actually exist in the edge. SOLUTION: This inspection method comprises a photographing process of taking a picture of an object for providing a photographed image, an edge direction differentiation process of performing differentiation in the edge direction of the object in the photographed image for generating an edge direction differentiation image, and a flaw detection process in the vicinity of the edge of detecting a flaw in the vicinity of the edge based on the edge direction differentiation image. This method is applicable to the flaw detection device in the vicinity of the edge.