| 摘要 |
PROBLEM TO BE SOLVED: To provide a thin-film tactile sensor for an artificial arm/leg, a robot, a manipulator, an in-body type medical equipment, an artificial skin and the like which is sensitive with less error, with no compensation circuit required. SOLUTION: There are provided a temperature detecting thin-film where a temperature sensitivity is high while a distortion sensitivity (or pressure sensitivity) is low as well as a distortion detecting thin-film where a distortion sensitivity (pressure sensitivity) is high while a temperature sensitivity is low. These two thin-film resistors, different from each other in feature, are arranged parallel or laminated so that both temperature and distortion (or pressure) are provided at the same time without using a compensation circuit. |
