| 摘要 |
PROBLEM TO BE SOLVED: To provide a micro fluid system having the excellent flexibility and realized in the reduction of costs and easy to be handled. SOLUTION: A board for actuator having an active element of an actuator, a heater and a cooler and a passive element such as various sensor and a board for cover forming a fluid element such as a flow passage, a mixing chamber and a pump chamber have the removable structure. When changing the arrangement of the fluid element, arrangement can be changed by changing the only board for cover. The board for actuator is formed into the high generalized structure by previously providing plural active elements or passive element like a lattice. The foreign matter in the fluid system can be easily eliminated by removing both the boards.
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