| 摘要 |
<p>PROBLEM TO BE SOLVED: To improve mode matching between a semiconductor laser element and an optical waveguide which are directly coupled by satisfactorily confining light to the optical waveguide, in an optical waveguide element which is directly coupled to the semiconductor laser element. SOLUTION: In the optical waveguide element 101 wherein the optical waveguide is formed on a substrate 20 consisting of Si or quartz and the semiconductor laser element is directly coupled to the end surface of the optical waveguide, an upper clad layers 24, 26, a first lower clad layer 21 and a second lower clad layer 22 are respectively formed on and under a core 23 of the optical waveguide. A light confining layer 28 which has a refractive index lower than that of the core 23 and has a stripe shaped groove extending in the waveguide direction and a refractive index waveguide mechanism consisting of an embedding clad layer 29 which is formed thereon, a part of which embeds the groove and has a refractive index higher than that of the light confining layer 28 are formed on the upper clad layer 26, and whereby a mode other than a basic lateral mode is interrupted.</p> |
