SOLUTION SUPPLYING DEVICE

摘要

PROBLEM TO BE SOLVED: To provide a solution supplying device which efficiently supplies a processing liquid. SOLUTION: The solution supplying device 1 has a gas-liquid separating vessel 60 into which the stock solution 10 of the processing liquid is supplied from a package 20 enclosed with the stock solution 10 of the processing liquid, a liquid feed pump 40 which delivers the stock solution of the processing liquid in the gas-liquid separating vessel 60 to a processing vessel 50 and an overepressure release valve 100 which varies the internal pressure in the gas- liquid separating vessel 60. The use of the device to a small-sized liquid feed pump 40 is made possible and the downsizing over the entire part of the device is made possible by providing the device with the overepressure release valve 100.