| 摘要 |
<p>PROBLEM TO BE SOLVED: To obtain a physical-quantity measuring apparatus in which an electric discharge to the surface of a sample or its peripheral device from a probe is hard to generate. SOLUTION: The physical quantity of the sample 2 is measured on the basis of the displacement or the vibration of the probe 3 generated due to an electrostatic attractive force acting between the probe 3 to which a voltage, in which an AC component and a DC component are superposed, is applied and the surface of the sample 2 arranged so as to face the probe 3. At this time, the feedback amount to the DC component of the applied voltage applied to the probe 3 is controlled on the basis of the displacement or the vibration of the probe 3. Thereby, the state on the surface of the sample 2 is not distrubed, an electric current is not cut off, and the physical quantity can be measured smoothly and with enhanced measurement accuracy.</p> |
