发明名称 DUAL-DOMAIN LATERAL SHEARING INTERFEROMETER
摘要 A defocused implementation of the lateral shearing interferometer in which an image-plane filter allows both phase-shifting and Fourier wavefront recovery methods to be readily used. The two wavefront recovery methods can be combined in a dual-domain technique providing suppression of noise added by self- interference of high-frequency components in the test-optic wavefront.
申请公布号 WO0212826(A1) 申请公布日期 2002.02.14
申请号 WO2001US41514 申请日期 2001.07.31
申请人 THE REGENTS OF THE UNIVERSITY OF CALIFORNIA;NAULLEAU, PATRICK, P.;GOLDBERG, KENNETH, ALAN 发明人 NAULLEAU, PATRICK, P.;GOLDBERG, KENNETH, ALAN
分类号 G01M11/02;G03F7/20;(IPC1-7):G01B9/02 主分类号 G01M11/02
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