ROBOT MOTION COMPENSATION SYSTEM

摘要

Motion of a substrate-transporting robot arm (34) is controlled in order to compensate for inaccuracies and deflections encountered during operation. The compensation is effected by synchronizing elevational and planar motions of the robot arm (34) such that the trajectory of the substrate (32) is made coincident with the object axis of the substrate (32). The substrate (32) may be a semiconductor wafer, an LCD panel or an end effector (47) of the robot arm (34). The synchronized motion is achieved using a controller (45) issuing control signals to arm actuating means (40, 41, and 43) based on synchronization algorithms developed during analytical or experimental robot learning sessions.