| 摘要 |
A plasma apparatus (100) separately measures multiple plasma jets (115, 125) upstream of where the plasma jets converge into a combined plasma stream (190). The separate plasma jets can be separately adjusted to place the separate jets in a configuration that provides the combined stream with desired properties for a plasma treatment. The system can include an injector (130) for a neutral jet (135) that becomes part of the combined plasma stream. With an injector, the positions of the plasma jets can be measured relative to the injector so that the plasma jets and the neutral jet are properly aligned to form a combine plasma stream having the properties desired. |
