摘要 |
The invention relates to an arrangement for the temperature-compensated multi-dimensional micropositioning of mutually position-defined optical components, comprising a guide unit for housing the optical components as well as several piezo actors. According to the invention, the guide unit consists of two spaced plates or rings, with several spaced solid joints being arranged or integrated between the rings or plates. Piezo actors are secured in a neighboring relationship with the solid joints in such a manner that actuation forces can be made to act on the rings or plates. At least the surfaces of the rings or plates accommodating the optical components are coated with a material corresponding to that of the optical components, with the coating being able to be machined prior to the securing operation, in particular a snap-on operation, of the optical components for a positional definition. The guide unit and the optical components are made from materials with essentially the same temperature coefficients.
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