发明名称 HYDROSTATIC GAS BEARING
摘要 The present invention has its object to provide a hydrostatic gas bearing excellent in a vibration-damping characteristic. The hydrostatic gas bearing is provided with a gas ejecting equipments composed of a cylindrical fine hole having a diameter of not less than 0.04 mm and not more than 0.4 mm, wherein a helium gas is ejected through the cylindrical fine hole. The cylindrical hole has a diameter D and a length L, and in the case where a relationship of D<4>/L is not more than 2 x 10<-4> mm<3> is established, the hydrostatic gas bearing excellent in the vibration-damping characteristic is specifically realized.
申请公布号 WO0212742(A2) 申请公布日期 2002.02.14
申请号 WO2001JP06536 申请日期 2001.07.30
申请人 NIPPON STEEL CORPORATION;NIKON CORPORATION;MUKAI, TOSHIO;TANAKA, KEIICHI 发明人 MUKAI, TOSHIO;TANAKA, KEIICHI
分类号 F16C29/02;F16C32/06 主分类号 F16C29/02
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