发明名称 Verfahren und Gerät zur Werskstückzufuhr zum Gerät zur Serienverarbeitung von Halbleiterplatten
摘要 <p>A processing end time calculation section (11) of a batch formation control section (6) refers to a history file (8) in response to a processing start report from a batch process apparatus (1, 1a) to predict a processing end time. A work extraction section (12) refers to a step management file (9) to extract those of the works which can arrive at a batch process apparatus (1, 1a) on or prior to the thus predicted processing end time. A batch formation section (13) forms, designating the thus extracted works as an object of batch formation, the works into a batch such that one of the works which has the highest preferential degree is designated as a top work of the batch. A transport section (4) transports the works of the batch collectively to the batch process apparatus (1, 1a). <IMAGE></p>
申请公布号 DE69618433(D1) 申请公布日期 2002.02.14
申请号 DE1996618433 申请日期 1996.11.15
申请人 NEC CORP., TOKIO/TOKYO 发明人 TOGASHI, YOICHI
分类号 H01L21/02;G05B15/02;G05B19/418;(IPC1-7):G05B19/418 主分类号 H01L21/02
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