发明名称 MOLD CLEANING SHEET AND METHOD OF PRODUCING SEMICONDUCTOR DEVICES USING THE SAME
摘要 A cleaning sheet (29) comprising a through-hole (29a) formed in a place corresponding to the cavity of a mold assembly, the corners of the outer periphery of the through-hole (29a) being formed with slits (29b) and a flow cavity cut (29c), the cleaning sheet being disposed between the first and second molds of the mold assembly to clean the interior of the mold assembly, intended to improve the cleaning efficiency for the mold assembly.
申请公布号 WO0211966(A1) 申请公布日期 2002.02.14
申请号 WO2001JP05547 申请日期 2001.06.28
申请人 HITACHI, LTD.;HITACHI YONEZAWA ELECTRONICS CO., LTD.;TSUCHIDA, KIYOSHI 发明人 TSUCHIDA, KIYOSHI
分类号 B29C33/72;B29C45/14;B29C45/17;H01L21/56;(IPC1-7):B29C33/72 主分类号 B29C33/72
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