POSITION SENSOR FOR ELECTROMAGNETIC ACTUATOR

摘要

A non-contact and highly accurate position sensor for electromagnetic actuator, comprising a detected shaft (1), a first magnet (2) fixed to the detected shaft (1) and having a first magnetic pole vector (2a) parallel with the axial direction of the detected shaft (1), a second magnet (3) disposed opposedly to the first magnet (2) and having a second magnetic pole vector (3a) three-dimensionally crossing the first magnetic pole vector (2a) generally at right angles, and first and second semiconductor magnetic resistance elements (5a, 5b) disposed on the second magnet (3) and used as magnetism-to-electricity converting parts having magnetic sensitive axes in the directions generally orthogonal to the directions of both first and second magnetic pole vectors (2a, 3a), whereby an output according to the axial movement of the detected shaft (1) can be provided from the first and second elements (5a, 5b).