| 摘要 |
An optical switch is fabricated on a single substrate and switches planar waveguides into and out of alignment with each other. The switch is constructed by selective deposition and etching of layers that make up the desired waveguides and physical structures of the switch. The physical structures include a movable structure upon which one of the waveguides resides, the movable structure being freed from the substrate by deep etching underneath it. A heat source may be used to provide heat to the movable structure, which causes its thermal expansion and resulting movement of the waveguide on it into or out of alignment with another waveguide. A third waveguide may be located so as to align with the waveguide on the movable structure when it is at an ambient temperature. |
