发明名称 HYDROSTATIC GAS BEARING
摘要 <p>The present invention has its object to provide a hydrostatic gas bearing excellent in a vibration-damping characteristic. The hydrostatic gas bearing is provided with a gas ejecting equipments composed of a cylindrical fine hole having a diameter of not less than 0.04 mm and not more than 0.4 mm, wherein a helium gas is ejected through the cylindrical fine hole. The cylindrical hole has a diameter D and a length L, and in the case where a relationship of D4/L is not more than 2 x 10-4 mm3 is established, the hydrostatic gas bearing excellent in the vibration-damping characteristic is specifically realized.</p>
申请公布号 WO2002012742(P1) 申请公布日期 2002.02.14
申请号 JP2001006536 申请日期 2001.07.30
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