| 摘要 |
<p>A substrate of a surface acoustic wave device is provided in which an intermediate layer for controlling the crystal characteristics of a piezoelectric layer is unlikely to separate from a diamond layer. A substrate (20) of a surface acoustic wave device (10) comprises a diamond layer (22), an intermediate layer (24) on the diamond layer (22), and a piezoelectric layer (26) on the intermediate layer (24). The piezoelectric layer (26) is formed of LiNbO3 or LiTaO3, and the intermediate layer (24) is formed of AlN.</p> |
