发明名称 METHOD FOR PRODUCING A TOOL WHICH CAN BE USED TO CREATE SURFACE STRUCTURES IN THE SUB- mu M RANGE
摘要 The invention relates to a method for producing a tool, and a tool which can be used to create optically active surface structures in the sub- mu m range. Said tool comprises a support surface to which surface structures are applied by depositing material, said surface structures being raised in relation to the support surface. The invention is characterised in that the support surface is indirectly bonded with a mask (2) in which openings (3) having diameters in the sub- mu m range are provided or can be placed; the support surface and the mask are subjected to a coating process during which coating material is deposited onto the support surface via the openings (3) in the mask; the mask is removed from the support surface when a partial amount of the average height of the end structure pertaining to the surface structures is obtained; and the coating process is continued without a mask and with similar or different coating material.
申请公布号 WO0212586(A1) 申请公布日期 2002.02.14
申请号 WO2001EP09232 申请日期 2001.08.09
申请人 FRAUNHOFER GESELLSCHAFT ZUR FOERDERUNG DER ANGEWANDTEN FORSCHUNG E.V.;BURMEISTER, FRANK;DOELL, WALTER;KLEER, GUENTER 发明人 BURMEISTER, FRANK;DOELL, WALTER;KLEER, GUENTER
分类号 C03B11/08;C03C17/25;C23C14/04 主分类号 C03B11/08
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