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发明名称
DEVICE AND METHOD FOR THERMALLY TREATING SUBSTRATES
摘要
申请公布号
EP1179287(A1)
申请公布日期
2002.02.13
申请号
EP20000927028
申请日期
2000.04.22
申请人
STEAG RTP SYSTEMS GMBH
发明人
WALK, HEINRICH;MADER, ROLAND;BLERSCH, WERNER;HAUF, MARKUS
分类号
H05B7/22;H01L21/00;H01L21/26;H01L21/268;H05B3/00;(IPC1-7):H05B6/00
主分类号
H05B7/22
代理机构
代理人
主权项
地址
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