Soft magnetic film soft magnetic multilayer film method of manufacturing the same and magnetic device

摘要

A soft magnetic film and a soft magnetic multilayer film of high saturation magnetization having an excellent soft magnetic property and a magnetic device use the same by providing an Fe-N thin film 2 formed on a substrate 1 with a configuration such that the main phases are alpha-Fe and gamma'-Fe4N, the crystal grain sizes of the alpha-Fe phase and the gamma'-Fe4N phase are reduced to as fine as not more than 10 nm, the spacings of the lattice plane (110) of alpha-Fe parallel to the film surface and the lattice plane (200) of gamma'-Fe4N are expanded compared to those in the condition where there is no lattice strain, and the spacing of the lattice plane (111) of gamma'-Fe4N is contracted compared to that in the condition where there is no lattice strain.