COATING APPARATUS AND METHOD

摘要

PROBLEM TO BE SOLVED: To provide a coating apparatus adapted so that it may diminish that area of a substrate which is defective in its coating film thickness and is formed at the start of coating film formation and that it may therefore apply a coating fluid uniformly and efficiently to a substrate of a sheet type. SOLUTION: While a substrate 8 to be coated is held by a holder 6 mounted on a stage 3, the horizontal position of the stage 3 is adjusted so that it may come over a preliminary coating member 7 mounted on the stage 3. A coating fluid is continuously fed into a coating nozzle 5 from a coating fluid feed mechanism and is then downwardly ejected from the slit 5a of the nozzle 5. At the same time, the stage 3 is allowed to slide by means of an air slide linear motor 2, the coating fluid ejected from the nozzle 5 is applied to the member 7 to adjust the amount of the coating fluid applied and then applied to the substrate 8.