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发明名称
摘要
申请公布号	JP3254787(B2)	申请公布日期	2002.02.12
申请号	JP19930034906	申请日期	1993.01.30
申请人		发明人
分类号	G01J1/02;B81B1/00;B81C1/00;G01J5/02;H01L37/00;(IPC1-7):G01J1/02	主分类号	G01J1/02
代理机构		代理人
主权项
地址

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