CERAMICS PARTS FOR MOVABLE PRECISION APPARATUS AND ITS MANUFACTURING METHOD

摘要

PROBLEM TO BE SOLVED: To provide ceramics parts for a movable precision apparatus like a magnetic disk apparatus whose reliability are enhanced by decreasing a particle generated (dropped out) from a surface of the parts and its manufacturing method. SOLUTION: The ceramics material is fired to form the parts, then heat- treated in the atmosphere or an oxidative atmosphere at 400-1400 deg.C, as a result a protective film is formed and the surface is repaired. The particle generation is remarkably decreased.