发明名称 |
Micromachined parylene membrane valve and pump |
摘要 |
A micromachined fluid handling device having improved properties. The valve is made of reinforced parylene. A heater heats a fluid to expand the fluid. The heater is formed on unsupported silicon nitride to reduce the power. The device can be used to form a valve or a pump. Another embodiment forms a composite silicone/parylene membrane. Another feature uses a valve seat that has concentric grooves for better sealing operation.
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申请公布号 |
US6345502(B1) |
申请公布日期 |
2002.02.12 |
申请号 |
US19980191267 |
申请日期 |
1998.11.12 |
申请人 |
CALIFORNIA INSTITUTE OF TECHNOLOGY |
发明人 |
TAI YU-CHONG;YANG XING;GROSJEAN CHARLES;WANG XUAN-QI |
分类号 |
B81B3/00;B81B7/00;F04B19/24;F04B43/04;F15C5/00;F16K99/00;(IPC1-7):F01B29/00;F03C5/00 |
主分类号 |
B81B3/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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