| 摘要 |
A resistive bolometer sensor is provided, in which a fixed resistor is replaced with a sensor resistor to reduce an error of an output value due to temperature variation, thereby improving sensitivity. The resistive bolometer sensor comprises: a sensing unit for sensing an infrared ray, the sensing unit including a sensor resistor and three compensation sensor resistors; a supporting unit for supporting the sensing unit, for controlling heat transfer to the outside; and a silicon rim supporting the overall elements of the sensor, for reflecting an external temperature, wherein the sensor resistor senses a resistance value by incident infrared ray, and the three compensation sensor resistors have a bridge structure with the sensor resistor and senses a environmental temperature to compensate a resistance value that varies in accordance with temperature variation.
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