发明名称 |
Method to make laminated yoke for high data rate giant magneto-resistive head |
摘要 |
A method and design for the fabrication of a laminated yoke for a high data rate magnetic read-write transducer head. A full film layer of first ferromagnetic material is formed on a base using either plating or sputtering. The base comprises a read head, a ferromagnetic pole piece, and a ferromagnetic shield which also serves as a pole piece. A patterned layer of first non-magnetic dielectric is then formed on the full film layer of first ferromagnetic material. A patterned layer of photoresist is then formed on the full film layer of first ferromagnetic material and the patterned non-magnetic dielectric and used as a frame for a frame plating deposition of a patterned layer of second ferromagnetic material. The full film layer of first ferromagnetic material and the non-magnetic dielectric are then patterned, using the patterned layer of second ferromagnetic material as a mask and ion beam etching.
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申请公布号 |
US6345435(B1) |
申请公布日期 |
2002.02.12 |
申请号 |
US19990443448 |
申请日期 |
1999.11.22 |
申请人 |
HEADWAY TECHNOLOGIES, INC. |
发明人 |
HAN CHERNG-CHYI;TORNG CHYU-JIUH;LEE RODNEY;JU KOCHAN |
分类号 |
G11B5/48;G11B5/55;G11B5/596;(IPC1-7):G11B5/42 |
主分类号 |
G11B5/48 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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