Measuring device for volume, pressure and temperature of flowing gas or liquid, comprises resistor bridge type sensors on crystalline semiconductor substrate

摘要

The measuring device utilizes integrated sensors on a monocrystalline or polycrystalline semiconductor substrate, the sensors being in the form of resistor bridges. One bridge is used for measuring and another is used as a heating element. The bridges are partly or fully supported by a thin membrane. The diagonal of the measuring bridge is connected to a difference amplifier.